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The UCAM article "Preparation of atomic layer deposited vanadium dioxide thin films using tetrakis(ethylmethylamino) vanadium as precursor" was published in

J. Vac. Sci. Technol. A 38, 052402 (2020) in July 2020

This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 737109 (PHASE-CHANGE SWITCH).